STS can provide a sensor package to allow the Applied Materials P5000 to process transparent substrates. We have successful utilized this sensor package for sapphire, quartz and silicon carbide wafers. A replacement IO wafer sensor is also available to protect against wafer breakage in the IO slit door. Click
here to view a demonstration video.
Your article held my interest right to the very end, which is not always an easy thing to do!!
ReplyDeletesilicon carbide wafer